Wafer Thickness

Instructions for Wafer Thickness

The Wafer Thickness tool generates data on the thickness of polished wafers manufactured under specified levels of three controls. For each sample, the thickness data are recorded and represented by a histogram.


There are two modes for running the Wafer Thickness tool: Real-Time Mode and Jump-to-Results Mode.

In Real-Time Mode:

  • Select the sample size from the drop-down menu.
  • Set the levels of Controls 1, 2, and 3 from the drop-down menus.
  • Click the “Collect Sample Data” button. Watch as each wafer’s thickness is measured, its thickness is recorded in a table, and is represented by a rectangle in the histogram.
  • For a second sample, click the “Collect Sample Data” button again. To compare the histogram from the second sample to the histogram from the first, click the “Compare to Previous” button. Click the “View Current” button to return to histogram of the most recently collected data.

Go

In Jump-to-Results Mode:

  • Select the sample size from the drop-down menu.
  • Set the levels of Controls 1, 2, and 3 from the drop-down menus.
  • Click the “Collect Sample Data” button. The thickness data are recorded in a table and represented graphically by a histogram. (It may take a few seconds for data and histogram to appear.) If you want to save these data, click the “Download CSV” button, select “Save As,” and name the data set.
  • For a second sample, click the “Collect Sample Data” button again. To save the second dataset, click the “Download CSV” button and give it a different name from your first dataset.
  • To compare the histogram from the second sample to that from the first, click the “Compare to Previous” button. Click the “View Current” button to return to histogram from the most recent sample data.
  • For a third sample, click the “Collect Sample Data” button again. To compare the histogram from the third sample to the histograms from the previous two samples, click the “Compare to Previous Two” button.

Go

Learning Outcomes

The Wafer Thickness tool gives students an opportunity to:


You’ll find activities and examples for the Wafer Thickness tool in Units 3 and 31.

Sample Size
In Control Parameters:
Control 1
Control 2
Control 3
Not sure what to do next? You can switch between this screen and the instructions without losing your place.
Thickness (mm)
 
Thickness (mm)
 
Thickness (mm)